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Zirconium Sputtering Targets (Zr)

Zirconium Sputtering Targets (Zr)
Material Type Zirconium
Symbol Zr
Atomic Weight 91.224
Atomic Number 40
Color/Appearance Silvery White, Metallic
Thermal Conductivity 22.7 W/m.K
Melting Point (°C) 1,852
Coefficient of Thermal Expansion 5.7 x 10-6/K
Theoretical Density (g/cc) 6.49
Z Ratio 0.6
Sputter DC
Max Power Density*
(Watts/Square Inch)
50
Type of Bond Indium, Elastomer
Export Control (ECCN) 1C234
Comments Alloys with W. Films oxidize readily.

General

Zirconium is a lustrous, grey-white, strong transition metal that resembles hafnium and, to a lesser extent, titanium. Zirconium is mainly used as a refractory and opacifier, although small amounts are used as an alloying agent for its strong resistance to corrosion. Zirconium sputtering target is widely used in decorating coating, semmcoductor and optical coating areas.

Material Notes

Purity: Zr+ Hf ≥ 99.4%, Zr+ Hf =99.95%, Hf<300ppm/4.5%
Circular: Diameter <= 14inch, Thickness >= 1mm
Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm
Targets Type: Planar sputtering target, Rotary sputtering target
This is an Export Controlled Material. Restrictions may apply.


Other Information of Zirconium Sputtering Targets

Applications
Decorative coating 
• Hardware tool coating

• Semiconductor
• 
Optical coating
Features
Competitive pricing
• High purity
• Grain refined, engineered microstructure

(Average grain size < 100 um)
• Semiconductor grade

Manufacturing Process
 Melting 
• Analysis
• Casting & Grain refinement
 
 Forging, Rolling, Annealing, Micrography, Machining
  Thermomechanical treatment
• Cleaning and final packaging - Cleaned for use in vacuum
  Protection from environmental contaminants
  Protection during shipment
Options
99.4% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
 
 

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