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AEM Deposition

Zirconium Oxide Sputtering Targets (ZrO2)

Zirconium Oxide Sputtering Targets (ZrO2)
Zirconium Oxide Sputtering Targets (ZrO2)
Material Type Zirconium Oxide
Symbol ZrO2
Color/Appearance White or Black, Solid
Melting Point (°C) 2,700
Theoretical Density 5.89
Z Ratio **1.00
Sputter RF, RF-R
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer
Export Control (ECCN) 1C234
Comments Films oxygen deficient, clear and hard.

Zirconium Oxide Sputtering Target

Zirconium Oxide (ZrO2), sometimes known as zirconia (not to be confused with zircon), is a white crystalline oxide of zirconium. Its most naturally occurring form, with a monoclinic crystalline structure, is the mineral baddeleyite. A dopant stabilized cubic structured zirconia, cubic zirconia, is synthesized in various colours for use as a gemstone and a diamond simulant.

Zirconium Oxide Sputtering Target Information

Zirconium Oxide Sputtering Target
Purity is 99.9%;
Circular: Diameter <= 14inch, Thickness >= 1mm;
Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

Other Information of Zirconium Oxide Sputtering Target


•  Ferroelectric
• Gate Dielectric

• For CMOS


• High purity
• Custom Sizes Available

Manufacturing Process

• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment


• 99.9% ex Strontium Minimum Purity

• Up to 12'' Diameter Targets Available

• Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

Related Products of Zirconium Oxide Sputtering Target

Ceramic Sputtering Targets
Zirconium Boride Sputtering Target
Evaporation Materials
Zirconium Evaporation Pellet
Zirconia Mortars & Pestles
Metal Powders
Zirconium Powder

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