Zirconium Oxide Sputtering Targets (ZrO2)
| Material Type | Zirconium Oxide |
| Symbol | ZrO2 |
| Color/Appearance | White or Black, Solid |
| Melting Point (°C) | 2,700 |
| Theoretical Density | 5.89 |
| Z Ratio | **1.00 |
| Sputter | RF, RF-R |
|
Max Power Density* (Watts/Square Inch) |
20 |
| Type of Bond | Indium, Elastomer |
| Export Control (ECCN) | 1C234 |
| Comments | Films oxygen deficient, clear and hard. |
Zirconium Oxide Sputtering Target
Zirconium Oxide (ZrO2), sometimes known as zirconia (not to be confused with zircon), is a white crystalline oxide of zirconium. Its most naturally occurring form, with a monoclinic crystalline structure, is the mineral baddeleyite. A dopant stabilized cubic structured zirconia, cubic zirconia, is synthesized in various colors for use as a gemstone and a diamond simulant.
Zirconium Oxide Sputtering Target Information
Zirconium Oxide Sputtering Targets
Purity: 99.9%;
Circular: Diameter <= 14 inch, Thickness >= 1mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
Other Information of Zirconium Oxide Sputtering Target
Applications• Ferroelectric• Gate Dielectric • For CMOS |
Features• High purity• Custom sizes available |
Manufacturing Process• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options• 99.9% minimum purity• Up to 12'' diameter targets available • Planar tiles up to 8'' X 5'' for larger target configurations |
Related Products of Zirconium Oxide Sputtering Target
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N/A
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Ceramic Sputtering Targets Zirconium Boride Sputtering Target |
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Evaporation Materials Zirconium Evaporation Pellet |
Crucibles Zirconia Mortars & Pestles |
Metal Powders Zirconium Powder |
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