Application and Introduction of Sputtering Target for Flat Panel Display
Sputtering target has a wide range of applications. The industries with a large amount of sputtering targets are mainly concentrated in the fields of integrated circuit, flat panel display, solar cell, magnetic recording media, optical devices, etc.
Among them, sputtering target material
for flat panel display is mainly used for ITO glass and touch screen electrode plate. Sputtering target coating is mainly used in the production of display panel and touch screen panel. It is mainly used to make ITO glass and touch screen electrode.
Among the sputtering targets, indium tin oxide (ITO) is the most widely used, followed by molybdenum, aluminum, silicon and other metal targets. AEM deposition can provide sputtering targets suitable for flat panel displays, as shown in the following table:
Panel production process of flat panel display:
1) In the production process of flat panel display panel, ITO glass is formed by sputtering and coating on glass substrate for many times, and then it is coated, processed and assembled to produce LCD panel, PDP panel and OLED panel;
2) For the production of touch screen, ITO glass needs to be processed, coated to form electrodes, and then assembled with protective screen and other components.
Among them, the silicon dioxide film formed by the sputtering of silicon target mainly plays the role of increasing the adhesion and flatness of glass and ITO film, surface passivation and protection, and the etching of moalmo (molybdenum aluminum molybdenum) target after coating mainly plays the role of metal lead bridging.
In addition, in order to realize the anti reflection and anti shadow functions of flat panel display products, the corresponding coating can be added in the coating process. AEM deposition, as a professional sputtering target manufacturer
, not only provides sputtering targets for flat panel display, but also provides sputtering targets for other application fields. Please refer to the following table for details:
If you need sputtering target materials, please click the link to enter the corresponding product page for more details.