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  • The target bonding methods are recommended for sputtering targets/ Indium bonding vs elastomer bonding

     
    What’s target bonding?
       
               



    Target bonding is an important process to use solder to bond sputtering targets to a backing plate. The sputtering targets are put into the sputtering source cathode inside the chamber (sputtering deposition system). Working at a higher power , the target’s surface generates a lot of heat. The solder layer can draw the heat from target’s surface into the backing plate. Then the heat is transferred through the piece of backing plate and is removed by the cooling water. The target bonding is very necessary to prevent cracking, warping and other damage of sputtering targets in the sputtering process. The bonding process can have a interface thermal integrity between cooling assembly and target’s surface, and it can increase longer working life for targets to tolerance most heat. 
    The most common bonding methods are indium bonding and elastomer bonding. What’s the difference between two methods?


    Indium bonding
     
    Indium is a preferred method that used in target bonding, because it has following features:
    1. Indium has a good thermal and conductive conductivity and it’s the most efficient to draw away much heat from the sputtering targets
    2. Indium is more malleable than other bonding solders to reduce the cracking risk that is caused by mismatch of targets and backing plate in thermal expansion coefficients.
    3. The bond can be taken apart, so the backing plate can be reused to save costs.


    The limitation of indium bond is that indium has a low melting point of 156.6°C. If the working temperature is over 150°C, the bond will melt and depart from the targets. Thus, the indium bond will be replaced by other bond method sometimes, although most materials can be indium bonded. Most of pure metal and ceramic sputtering targets can use indium bonding method.


    Elastomer bonding
     
    Elastomer bond is an alternative method for indium bond when applied in a higher temperature. This bonding method is recommended in following situations:
    1. When the indium bonds are consistently melted during working.
    2. The sputtering targets have a low melting points, low density, fragile and are sensitive to temperature. The elastomer bonding is performed at a low temperature between 50°C and 100°C, so it is gentle on the targets during the bonding process.
    3. The elastomer bond does not absorb any moisture, and it’s suitable to handle cycle between vacuum and atmosphere.
    However, the elastomer bond will outgas in a vacuum chamber for most polymer based materials.

    These sputtering targets are require elastomer bonding:
    Pure metal sputtering targets: Indium (In) sputtering target, Bismuth (Bi) sputtering target, Lithium (Li) sputtering target, Manganese (Mn) sputtering target, Selenium (Se) sputtering target,.....
    Oxide sputtering targets: Cobalt Oxide (CoO) sputtering target, Tin Oxide (SnO2) sputtering target, Strontium Titanate (SrTiO3), Barium Strontium Titanate (Ba0.5Sr0.5TiO3), Lithium Orthophosphate (Li3PO4) sputtering target and Lithium battery materials targets....
    Other sputtering targets: Aluminum Nitride ( AlN) sputtering target, Germanium Telluride (GeTe) sputtering target....


    The following is table summarizes comparison of indium bonding and elastomer bonding
     
    Bonding method Indium bonding Elastomer bonding
    Maximum operating temperature (℃) 150  ℃ 250 ℃
    Thermal conductivity (W/mk) 83 54
    Coefficient of Thermal Expansion (K-1) 32.1 x 10-6 2.2 x 10-4
    Electrical Resistivity (ohm-cm) 8 x 10-6 0.0476
    Bond Coverage >95% >98%
    Bond liner Thickness 0.010" ± 0.003" 0.01-0.025’’

    AEM deposition offers various sputtering targets and provide indium & elastomer bonding service. We have copper, Oxygen Free Copper (OFHC), Molybdenum and Stainless steel backing plates to meet customer’s requirements.


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