86-0731-89578196 [email protected]

Tungsten Oxide Sputtering Targets (WO3)

Tungsten Oxide Sputtering Targets (WO3)
Material Type Tungsten Oxide
Symbol WO3
Color/Appearance Lemon Yellow, Solid
Melting Point (°C) 1,473
Theoretical Density (g/cc) 7.16
Z Ratio **1.00
Sputter RF-R
Type of Bond Indium, Elastomer
Comments Preheat gently to outgas. W reduces oxide slightly.

General

Tungsten(VI) oxide, also known as tungsten trioxide or tungstic anhydride, WO3, is a chemical compound containing oxygen and the transition metal tungsten. It is obtained as an intermediate in the recovery of tungsten from its minerals. Tungsten ores are treated with alkalis to produce WO3. Further reaction with carbon or hydrogen gas reduces tungsten trioxide to the pure metal.

Material Notes

Tungsten Trioxide Sputtering Target, Purity is 99.99%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

 
 


Other Information of Tungsten Oxide Sputtering Targets

Applications
  Ferroelectric
• Gate Dielectric

• For CMOS

Features
• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

Options
• 99.9% ex Strontium Minimum Purity

• Up to 12'' Diameter Targets Available

• Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

 
 
Click for a downloadable datasheet on the Tungsten Oxide Sputtering Targets (WO3)
Can't find the downloadable datasheet you need? Click here to send email to get it.
Click here for answers to some of the most common questions we get asked.