Tungsten Disulfide Sputtering Targets (WS2)

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Tungsten Disulfide Sputtering Targets (WS2)

Material Type	Tungsten Disulfide
Symbol	WS₂
Color/Appearance	Dark Gray, Crystalline Solid
Melting Point (°C)	1,250

Theoretical Density (g/cc)	7.5
Z Ratio	**1.00
Sputter	RF
Type of Bond	Indium, Elastomer

General

Tungsten disulfide is the chemical compound with the formula WS2. It occurs naturally as the rare mineral tungstenite. This material is a component of certain catalysts used for hydrodesulfurization and hydrodenitrification.WS2 adopts a layered structure related to MoS2, with W atoms situated in trigonal prismatic coordination sphere. Owing to this layered structure, WS2 forms inorganic nanotubes, which were discovered on an example of WS2 in 1992.

Material Notes

Tungsten Disulfide Sputtering Target, Purity is 99.8%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 1.4m(by several pieces construction), Width <= 12inch, Thickness >= 1mm. Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity.This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock. Tungsten Sulfide (WS2) is commonly used in electronic industries.

Other Information of Tungsten Disulfide Sputtering Targets

Applications
• PVD and CVD display
• Semiconductor

• Optical

Features
• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Hot pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

Options
• 99.5% Minimum Purity

• Discs, Plates, Column Targets, Step Targets, Custom-made shape

• Indium bonding service