Molybdenum Disilicide Sputtering Targets (MoSi2)
| Material Type | Molybdenum Silicide |
| Symbol | MoSi2 |
| Melting Point (°C) | 2,050 |
| Theoretical Density (g/cc) | 6.31 |
| Z Ratio | **1.00 |
| Sputter | RF |
| Type of Bond | Indium, Elastomer |
| Comments | Decomposes. |
General
Molybdenum disilicide (MoSi2, or molybdenum silicide), an intermetallic compound, a silicide of molybdenum, is a refractory ceramic with primary use in heating elements. It has moderate density, melting point 2030°C , and is electrically conductive. At high temperatures it forms a passivation layer of silicon dioxide, protecting it from further oxidation. It is a gray metallic-looking material with tetragonal crystal structure; its beta-modification is hexagonal and unstable. It is insoluble in most acids but soluble in nitric acid and hydrofluoric acid.
Material Notes
Molybdenum Disilicide Sputtering Target, Purity is 99.5%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.
Other Information of Molybdenum Disilicide Sputtering Targets
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Applications • PVD and CVD display • Semiconductor • Optical |
Features • High purity • Custom Sizes Available |
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Manufacturing Process • Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options • 99% Minimum Purity • Up to 12'' Diameter Targets Available • Planar Tiles Up to 8'' X 5'' for Larger Target Configurations |
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