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Molybdenum Disilicide Sputtering Targets (MoSi2)

Molybdenum Disilicide Sputtering Targets (MoSi2)
Material Type Molybdenum Silicide
Symbol MoSi2
Melting Point (°C) 2,050
Theoretical Density (g/cc) 6.31
Z Ratio **1.00
Sputter RF
Type of Bond Indium, Elastomer
Comments Decomposes.


Molybdenum disilicide (MoSi2, or molybdenum silicide), an intermetallic compound, a silicide of molybdenum, is a refractory ceramic with primary use in heating elements. It has moderate density, melting point 2030°C , and is electrically conductive. At high temperatures it forms a passivation layer of silicon dioxide, protecting it from further oxidation. It is a gray metallic-looking material with tetragonal crystal structure; its beta-modification is hexagonal and unstable. It is insoluble in most acids but soluble in nitric acid and hydrofluoric acid.

Material Notes

Molybdenum Disilicide Sputtering Target, Purity is 99.5%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

Other Information of Molybdenum Disilicide Sputtering Targets

  PVD and CVD display
• Semiconductor

• Optical

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

• 99% Minimum Purity

• Up to 12'' Diameter Targets Available

• Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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