Molybdenum Disilicide Sputtering Targets (MoSi2)

Molybdenum disilicide (MoSi2, or molybdenum silicide) is an intermetallic compound, a silicide of molybdenum. It is a refractory ceramic with primary use in heating elements. It has moderate density, a melting point of 2030°C, and is electrically conductive. At high temperatures, it forms a passivation layer of silicon dioxide, protecting it from further oxidation. It is a gray metallic-looking material with a tetragonal crystal structure. Its beta-modification is hexagonal and unstable. It is insoluble in most acids but soluble in nitric acid and hydrofluoric acid.