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AEM Deposition

Titanium Monoxide Evaporation Material (TiO)

Titanium Monoxide Evaporation Material (TiO)
Titanium Monoxide Evaporation Material (TiO)
Material Type Titanium (II) Oxide
Symbol TiO
Color/Appearance Dark, Crystalline Solid
Melting Point (°C) 1,750
Theoretical Density (g/cc) 4.95
Z Ratio **1.00
E-Beam Good
Thermal Evaporation Techniques Boat:  W, Mo
Crucible:  VitC
E-Beam Crucible Liner Material Fabmate®, Tantalum
Temp. (°C) for Given Vap. Press. (Torr) 10-4:  ~1,500
Comments Preheat gently to outgas.


Titanium(II) oxide (TiO) is an inorganic chemical compound of titanium and oxygen. It can be prepared from titanium dioxide and titanium metal at 1500 °C. It is non-stoichiometric in a range TiO0.7 to TiO1.3 and this is caused by vacancies of either Ti or O in the defect rock salt structure. In pure TiO 15% of both Ti and O sites are vacant. Careful annealing can cause ordering of the vacancies producing a monoclinic form which has 5 TiO units in the primitive cell that exhibits lower resistivity. A high temperature form with titanium atoms with trigonal prismatic coordination is also know.

Material Notes

AEM Deposition provides Titanium Monoxide pellets, Titanium Monoxide pieces, and Titanium Monoxide powder for sale, purity is 99.9%.

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