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Titanium Dioxide Sputtering Targets (TiO2)

Titanium Dioxide Sputtering Targets (TiO2)
Material Type Titanium (IV) Oxide
Symbol TiO2
Color/Appearance White-Beige, Gray-Black
Melting Point (°C) 1,830
Theoretical Density (g/cc) 4.23
Z Ratio 0.4
Sputter RF, RF-R
Max Power Density*
(Watts/Square Inch)
20
Type of Bond Indium, Elastomer
Comments Suboxide, must be reoxidized to rutile. Ta reduces TiO2 to TiO and Ti.

General

Titanium dioxide, also known as titanium(IV) oxide or titania, is the naturally occurring oxide of titanium, chemical formula TiO2. When used as a pigment, it is called titanium white, Pigment White 6 (PW6), or CI 77891. Generally it is sourced from ilmenite, rutile and anatase. It has a wide range of applications, from paint to sunscreen to food coloring.

We also have high quality pure titanium sputtering targets with 99.995% purity  for sale.

Material Notes

Titanium Dioxide Sputtering Target, Purity is 99.99%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm. Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity.This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock.
 



Other Information of Titanium Dioxide Sputtering Targets

Applications
  Ferroelectric
• Gate Dielectric

• For CMOS

Features
• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

Options
• 99.9% ex Strontium Minimum Purity

• Up to 12'' Diameter Targets Available

• Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

 
 
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