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Lanthanum Strontium Copper Oxide Sputtering Targets (La(1-x)SrxCuO4)

Material Type	Lanthanum Strontium Copper Oxide
Symbol	La_(1-x)Sr_xCuO₄
Color/Appearance	Various colors, Solid
Melting Point (°C)	N/A

Relative Density (g/cc)	>90%
Z Ratio	N/A
Sputter	RF, RF-R, DC
Max Power Density* (Watts/Square Inch)	N/A
Type of Bond	Indium, Elastomer
Comments

Lanthanum Strontium Copper Oxide Sputtering Targets

Applications

• Ferroelectric
• Gate Dielectric

• For CMOS

Features

• High purity
• Custom Sizes Available

Manufacturing Process

• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

Options

• 99.9% minimum purity

• Smaller sizes also available for R&D applications

• Sputtering target bonding service

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