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Lanthanum Strontium Manganate Sputtering Targets (La1-xSrxMnO3)

Lanthanum Strontium Manganate Sputtering Targets (La1-xSrxMnO3)
Material Type Lanthanum Strontium Manganate
Symbol La(1-x)SrxMnO3, LSMO
Color/Appearance Various colors, Solid
Melting Point (°C) N/A
Relative Density (g/cc) 6.5
Z Ratio N/A
Sputter RF, RF-R, DC
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer

Other Information of Lanthanum Strontium Manganate Sputtering Targets

• Gate Dielectric

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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