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Zinc Oxide doped with Gallium Oxide (GZO) Sputtering Targets (ZnO/Ga2O3 95/05 wt%)

Zinc Oxide doped with Gallium Oxide (GZO) Sputtering Targets (ZnO/Ga2O3 95/05 wt%)
Material Type Ga2O3 doped Zinc Oxide, GZO
Symbol ZnO / Ga2O3, 95 / 5 wt%
Color/Appearance Grey to Black, Solid
Melting Point (°C) N/A
Relative Density (g/cc) >95%
Water Solubility Insoluble
Sputter RF, RF-R, DC
Type of Bond Indium, Elastomer
Comments Various composition available


AEM Deposition is a professional distributor of GZO sputter targets and other rare elements products. Typical purity for ZnO/Ga2O3 targets are 99.9% ~ 99.99%. GZO is a common material and a routinely made sputter target for us. We are proud to claim the due to the large scale equipment recently online, we got capability to produce ceramic sputter targets as large as 18" circular disc.

Material Notes

Zinc Oxide doped with Gallium Oxide Sputtering Target, Purity is 99.99%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.


Other Information of Zinc Oxide doped with Gallium Oxide (GZO) Sputtering Targets

• Gate Dielectric

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

• 99.9% ex Strontium Minimum Purity

• Up to 12'' Diameter Targets Available

• Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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