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AEM Deposition

Zinc Oxide Sputtering Targets (ZnO)

Zinc Oxide Sputtering Targets (ZnO)
Zinc Oxide Sputtering Targets (ZnO)Zinc Oxide Sputtering Targets (ZnO)Zinc Oxide Sputtering Targets (ZnO)Zinc Oxide Sputtering Targets (ZnO)
Material Type Zinc Oxide
Symbol ZnO
Color/Appearance White, Crystalline Solid
Melting Point (°C) 1,975
Theoretical Density (g/cc) 5.61
Z Ratio 0.556
Sputter RF-R
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer


Zinc oxide is an inorganic compound with the formula ZnO. ZnO is a white powder that is insoluble in water, and it is widely used as an additive in numerous materials and products including rubbers, plastics, ceramics, glass, cement, lubricants, paints, ointments, adhesives, sealants, pigments, foods, batteries, ferrites, fire retardants, and first-aid tapes. Although it occurs naturally as the mineral zincite, most zinc oxide is produced synthetically.

Material Notes

Zinc Oxide Sputtering Target, Purity is 99.9% - 99.99%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm. Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity.This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock.

Other Information of Zinc Oxide Sputtering Targets

• Gate Dielectric

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

• 99.9% ex Strontium Minimum Purity

• Up to 12'' Diameter Targets Available

• Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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