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AEM Deposition

Magnesium Aluminate (MgAl6O10)

Magnesium Aluminate (MgAl6O10)
Magnesium Aluminate (MgAl6O10)


Magnesium Aluminate (MgAl6O10) is an excellent substrate film for GaN and ZnO exitaxial film. It has lower lattice mismatch and thermal expansion mismatch with GaN than MgAl2O4 crystal. In addition, the lower melting point of MgAl6O10 is suitable for growing bigger size and high quality crystals.

Physical Properties

Material MgAl6O10
Crystal Structure M3
Lattice Constant(A) a=7.9780
Density(g/cm3) 3.585 g/cm3
Thermal EXpansivity a/6.5 x 10-6 /℃

c/3.7 x 10-6 /℃


Size 5x5mm, 10x10mm, 15x15mm, 20x20mm, Dia 2'' (maximum size)
Crystal Orientation <100>  <110> <111>
Polished SSP or DSP
Redirection precision ±0.5°
Angle of crystalline Special size and orientation are avaiable for request
Ra: ≤5Å(5µm×5µm)


100 clean bag, 1000 exactly clean room
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