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AEM Deposition

Si Substrate

Si Substrate
Si Substrate


Silicon widely used in seconductor industry for semiconductor materials, high power transistors, rectifiers, solar cells. We produce Prime silicon wafer, testing wafer and dummy wafer.

Physical Properties

Material Silicon
Growth Method CZ, MCZ, FZ
Structure M3
Melting point 1420℃
Density(g/cm3) 2.4 g/cm3
Doped Material undoped  B-doped P-doped
Type    P /N P N
Resistivity >1000 Ωcm 10-3 ~40 Ωcm 0.05~0.1 Ωcm
Thermal-expans ≤100/cm2 ≤100/cm2 ≤100/cm2


Grade Prime, Test, Dummy
Size 10x10, 15x15, 20x 15, 20x 20 (customized size avalible),Dia 1'', Dia 2'',Dia 3'', Dia 4'', Dia 5'' Dia 6'', Dia 8''. Dia12''
Thickness 0.3- 0.5mm, 1.0mm
Polished SSP or DSP
Orientation <100>,<110>, <111>
Redirection precision ±0.5°
Redirection the edge 2°(special in 1°)


100 clean bag, 1000 exactly clean room
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