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AEM Deposition

Al2O3 Ceramic substrate

Al2O3 Ceramic substrate
Al2O3 Ceramic substrate


The Alumina (Al2O3) ceramic substrate has low thermal conductivity (20W/m.K). It's the widely used ceramic substrate because of its relatively simple production process, low cost and low price.

Physical Properties

Material Al2O3
Purity 96%, 99.5%
Density(g/cm3) 3.78 g/cm3
Hardness 9.2(Mohns)
Thermal conductivity (W/m. K) 26
Thermal Expansion (x10-6/oC) 7.2x10-6
Dielectric Constant (at 1MHZ) 9.6
Flexural Strength (N/mm2)  380
Loss Tangent (x10-4 @1MHZ)   


Size 100 x 100 x 1.0 mm
(customized size avalible)
Ra: polished <0.01um, 

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